Title: Overview of Nanofabrication Technology
Abstract: Nanotechnology is the hottest pursued subject worldwide in recent years. The key to nanotechnology is the making of various nanostructures, which specifically refers to making structures less than 100nm in at least one-dimension. At one dimension there are thin films of a few atomic layers thickness. At three-dimension there are nanoparticles, carbon nanotubes and nanowires. However, majority of nanostructures are two dimensional and are made by various nanofabrication techniques. They are the basic tools to form variety of functional nanodevices and systems. Currently many nanofabrication techniques are available. Most of them are evolved from making microstructures. This can often cause confusion to users who are facing wide choices of technology for their specific purpose.The talk will focus only on those technologies which can make structures less than 100nm. Special attention is given to the technologies which are popular and affordable at a research laboratory environment. Their basic feature and capabilities are introduced. It is hoped that the talk will present a general overview of the existing nanofabrication technologies and point out some new trends in this field.

崔铮简历
崔铮博士毕业于南京东南大学。1989年9月在英国科学与工程研究委员会访问研究基金资助下，到英国剑桥大学微电子研究中心做博士后研究。1993年应聘英国卢瑟福国家实验室微结构中心高级研究员。自1999年以来任英国卢瑟福国家实验室微纳米技术首席科学家与微系统技术中心负责人(Principal Scientist，Group Leader)。2009年7月回国加盟中科院苏州纳米所。主要研究领域为微纳米加工技术及其应用。在英国工作20年来先后参加了数十项欧洲与英国研究项目，应邀担任欧洲第六、第七框架研究计划的评审专家，欧洲研究理事会的评审专家，英国国家科研项目评审专家，并应邀为20多种学术杂志评审论文；目前为英国物理学会会员，英国工程技术学会（IET）资深会员（Fellow）。2002年受聘为中国科学院海外评审专家。2004年获中国科学院海外杰出学者基金。2007年参加中科院物理所纳米电子材料与器件海外合作团队。2009年应邀担任ChinaNano2009纳米加工技术分会主席与国际纳米技术年会(Nanotech2009) 纳米加工技术分会技术程序委员会成员。先后独立与合作发表学术论文190余篇。独立撰写并出版专著4部（中英文各两部）。包括英文专著 “Nanofabrication: Principles, Capabilities and Limits” (Springer, 2008)和2009年6月由高教出版社出版的中文专著“微纳米加工技术及其应用（第二版）”。