纳米加工技术综述 (Overview of Nanofabrication Technology)
报告介绍 Title: Overview of Nanofabrication TechnologyAbstract: Nanotechnology is the hottest pursued subject worldwide in recent years. The key to nanotechnology is the making of various nanostructures, which specifically refers to making structures less than 100nm in at least one-dimension. At one dimension there are thin films of a few atomic layers thickness. At three-dimension there are nanoparticles, c...